发明名称 METHOD OF FABRICATING THIN FILM TRANSISTOR FLAT PANEL DISPLAY
摘要 A method of fabricating a thin film transistor (TFT) flat panel display. The method merely comprises four mask steps of: (1) using the first mask process for patterning the first conductive layer/gate insulating layer/amorphous silicon layer of the TFT, (2) using the second mask process for defining the passivation layer and the etching stopper, (3) using the third mask process for forming the Source/Drain, and (4) using the fourth mask process for forming the pixel electrode, whereby simplifying the fabricating process of the TFT flat panel display.
申请公布号 US2003017636(A1) 申请公布日期 2003.01.23
申请号 US20020200831 申请日期 2002.07.22
申请人 AU OPTRONICS CORP. 发明人 LAY CHUNG-WEN;WU MENG-YUEH
分类号 G02F1/1362;H01L21/336;(IPC1-7):H01L21/00 主分类号 G02F1/1362
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