| 发明名称 |
GAS DELIVERY METERING TUBE |
| 摘要 |
PURPOSE: A gas delivery metering tube is provided to deliver gas to an end opposite to the outer tube connected to a gas entrance by supplying more even backing pressure over the entire length of the gas delivery metering tube than that of the gas introduced only through a single tube. CONSTITUTION: The gas delivery metering tube(10) includes a two-axially aligned nested tubes. At least the inner tube(12) receives a gas through one end of the assembly and conveys gas to the outer tube(14). The outer tube contains one or more arrays orifices(18).
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| 申请公布号 |
KR20030007162(A) |
申请公布日期 |
2003.01.23 |
| 申请号 |
KR20020040745 |
申请日期 |
2002.07.12 |
| 申请人 |
ASML US, INC. |
发明人 |
DEDONTNEY JAY BRIAN;DESA ANTHONY;KURITA SAMUEL |
| 分类号 |
F16L55/00;C23C16/44;C23C16/455;F17D1/04;G05D7/01;H01J37/32;H01L21/205;(IPC1-7):H01L21/205 |
主分类号 |
F16L55/00 |
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