METHOD OF SURFACE TREATMENT FOR COPPER WORKPIECE

摘要

A method of the surface treatment for a copper workpiece, wherein the surface of the copper workpiece is treated , at first with an electrolyzed alkaline ion water, secondly with an electrolyzed acidic ion water, and finally with an electrolyzed alkaline ion water, followed by washing with water and drying, and wherein the discharged water derived from the electrolyzed acidic ion water is mixed with that derived from the electrolyzed alkaline ion water, to effect a neutralization reaction, and a copper ion is recovered from the resultant neutral water. The method allows the soft etching of the surface of a copper workpiece which achieves the degreasing of the surface and the removal of an oxide film and also improved adhesion of the surface with a resist film, and further allows pollution−free treatment of the discharged water resulting from the soft etching.