JOSEPHSON JUNCTION DEVICE AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A method for fabricating a Josephson junction device is provided to easily fabricate the junction device and improve productivity by forming an amorphous layer between epitaxially-grown superconductive grains while using a patterned seed layer and by controlling the thickness of the amorphous layer through a subsequent heat treatment process. CONSTITUTION: An amorphous material is formed on a substrate. The amorphous material is patterned by using photoresist and is etched to form a seed layer(2). A superconductive thin film(3) is deposited on the substrate including the patterned seed layer. A capping layer is formed on the superconductive thin film and is patterned to form an electrode(6).