| 摘要 |
In accordance with the present invention, in one embodiment, a semiconductor apparatus for transferring workpiece with protection feature is provided. The semiconductor apparatus comprises a processing tool having a movable platform for supporting a workpiece, an interface apparatus having a robotic transfer means is to transfer the workpiece between the movable platform and the interface apparatus, a sensor means is for detecting whether the movable platform is in a selected condition, and producing an output, and a control module responsive to the output is to control the robotic transfer means. If the sensor detects that the movable platform is not ready, the protection feature is activated to disable the load/unload function of the robotic transfer means of the interface apparatus to prevent damage due to improper operation.
|
