| 摘要 |
PURPOSE: A gas delivery device is provided to secure an operator from a danger of an additional process for inspecting residual gas by automatically detecting the residual gas while using a sensor installed in a vent line. CONSTITUTION: A plurality of cylinders(12,14) are prepared. A plurality of process lines(16,18) are connected to an end of the plurality of cylinders and transfers storage gas to a chamber. A plurality of the first valves are connected in series to each process line. The vent line(20) is commonly connected to the process lines. A plurality of the second valves controls the gas transferred from the plurality of process lines, connected to the vent line. A sensor senses the residual gas of the vent line transferred through the second valve, installed in a common connection point of the vent line. A plurality of sensors for sensing gas pressure are installed in the plurality of process lines, respectively.
|
