发明名称 |
Fluid delivery ring and methods for making and implementing the same |
摘要 |
A fluid delivery module for use in preparing a substrate is provided. The fluid delivery module includes a process bowl designed to contain a substrate to be prepared. The process bowl has a bottom wall and a sidewall. The fluid delivery module further includes a fluid delivery ring configured to be attached to the sidewall of the process bowl. The fluid delivery ring includes a plurality of inlet and outlet pairs. Each of the plurality of inlet and outlet pairs is defined in the fluid ring and is designed to receive a respective supply tube. Each respective supply tube has an end that terminates at each of the outlets of the fluid delivery ring and is configured to direct fluid onto a surface of the substrate.
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申请公布号 |
US2003015224(A1) |
申请公布日期 |
2003.01.23 |
申请号 |
US20020251483 |
申请日期 |
2002.09.19 |
申请人 |
LAM RESEARCH CORP. |
发明人 |
SMITH STEPHEN M.;TREUR RANDOLPH E. |
分类号 |
H01L21/304;H01L21/00;(IPC1-7):B08B9/20 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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