SUBSTRATE RECEIVING CONTAINER, SUBSTRATE CARRIER SYSTEM, STORAGE APPARATUS AND GAS SUBSTITUTION METHOD

摘要

PURPOSE: A substrate receiving container, a substrate carrier system, a storage apparatus and a gas substitution method are provided to replace the atmosphere inside the wafer carrier efficiently in a short time while preventing the mixing of foreign matter. CONSTITUTION: A wafer carrier comprises a housing having an open surface on one side, a door fitting to the housing on the open surface, a gas inlet for introducing a gas for replacing atmosphere inside the wafer carrier(200), and a gas suction port for sucking the atmosphere inside the wafer carrier.