SEMICONDUCTOR FABRICATION APPARATUS HAVING ALIGNMENT DEVICE

摘要

PURPOSE: A semiconductor fabrication apparatus having an alignment device is provided to perform rapidly a fabrication process regardless of a process time of an alignment chamber by installing the alignment device at a loader. CONSTITUTION: A plurality of wafers are loaded in the inside of a cassette. The cassette having the plural wafers is loaded on a loader(20). A load lock chamber is used for drawing the wafers from the cassette, loading the wafers, and standing by the next process. A process chamber(50) is used for processing the wafers. A buffer chamber(40) is located between the load lock chamber and the process chamber(50). The loader(20) has an alignment device(60) to align the wafers. In addition, the loader(20) has an opening portion. The alignment device has a roller contacted with a circumference of the wafer and a driving portion for driving the roller.