SUBSTRAT MIT GERICHTETER LEITFÄHIGKEIT SENKRECHT ZU SEINER OBERFLÄCHE, VORRICHTUNGEN MIT EINEM SOLCHEN SUBSTRAT UND VERFAHREN ZUR HERSTELLUNG EINES SOLCHEN SUBSTRATES

摘要

Substrate (7; 7'; 10) and devices including such a substrate, the substrate having a first surface and a second surface extending substantially in parallel to the first surface, the substrate being of a material of a first conductivity and provided with a plurality of electrically conducting channels (21) which are extending exclusively in a direction perpendicular to the first and second surfaces, said channels having a second conductivity substantially larger than the first conductivity, the substrate being provided with at least one electrode (42) on either one of the first and second surfaces, contacting at least one of said channels, the at least one electrode (42) having a predetermined minimum dimension (D) in a contact area (A) with the substrate, and mutual distances between adjacent ones of the plurality of channels (21) being smaller than said minimum dimension of said at least one electrode (42).