发明名称 |
Method of producing ink-jet recording head |
摘要 |
A method of producing an ink-jet recording head using ion milling is provided. The method includes the steps of forming a piezoelectric layer subsequent to an electrode layer on a substrate by using a thin-film deposition technology, forming an energy-generating element for generating energy for ink ejection by etching the electrode layer and the piezoelectric layer simultaneously by ion milling, and removing a fence formed by deposits of mixed fine powders including those etched off the electrode layer and the piezoelectric layer.
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申请公布号 |
US2003015492(A1) |
申请公布日期 |
2003.01.23 |
申请号 |
US20020175156 |
申请日期 |
2002.06.20 |
申请人 |
FUJITSU LIMITED |
发明人 |
KOIKE SHUJI;SAKAMOTO YOSHIAKI;SHINGAI TOMOHISA;OTANI SEIGEN;OSADA TOSHIHIKO;KURIHARA KAZUAKI |
分类号 |
B41J2/16;(IPC1-7):B41J2/16 |
主分类号 |
B41J2/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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