OPTICAL WAVEGUIDE ROW LATTICE HAVING THREE DIMENSIONAL TAPERED CONNECTOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: An optical waveguide row lattice having a three dimensional tapered connector and a method for manufacturing the same are provided to minimize a loss of an optical signal due to a clad layer which is formed between optical waveguides forming an optical waveguide row lattice. CONSTITUTION: A core layer(530) is formed on a substrate(510). An etching mask(540) is formed on the core layer(530) using a photo resist layer(550) having a predetermined pattern. A seed layer is formed on the exposed core layer and the photo resist layer(550). The seed layer is formed by a conductive material. An electroplating is performed in order to form a metal plating layer on the seed layer. The photo resist layer(550) and the metal plating layer formed on the photo resist layer(550) are removed by means of a wet etching method. The substrate(510) performed by the above steps is plasma-etched to form an optical waveguide.