| 摘要 |
A method for manufacturing a multi-layered film reflection mirror, in which a desirable shape precision of a reflective wave front can be obtained after locally scraping the multi-layered film, is provided. The method for manufacturing a multi-layered film reflection mirror according to the present invention, in which a multi-layered film which at least two types of substances having different refractive indices respectively are synchronously deposited. with a constant periodic length is formed on a substrate, and the multi-layered film on the substrate is locally scraped in order to correct a phase of a reflective wave front in a reflective surface, wherein said multi-layered film has an internal stress of 50 MPa or smaller. <IMAGE> |
