Structure and method for fabricating an optical bus

摘要

An optical bus communicates data between external devices by sending and receiving emissions between an optical source and an optical detector within an enclosure. Each optical source may be paired with an optical detector to form a source-detector pair. The optical source and the optical detector can be formed within a semiconductor structure which forms at least part of the enclosure. The semiconductor structure includes high quality epitaxial layers of monocrystalline materials that can be grown overlying monocrystalline substrates such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers. An accommodating buffer layer comprises a layer of monocrystalline oxide spaced apart from a silicon wafer by an amorphous interface layer of silicon oxide. Any lattice mismatch between the accommodating buffer layer and the underlying silicon substrate is taken care of by the amorphous interface layer.