| 摘要 |
A vertical ceramic wafer boat (20) for supporting a silicon wafer (39) having predetermined radius (R). The wafer boat (20) comprises a base portion (22) and a column rack (24), which extends generally vertically upwards from the base portion (22). The column rack (24) includes a pair of vertical column rack supports (40) extending generally vertically upwards from the base portion (22). The column rack (24) also includes a plurality of wafer supports (42) having a generally Y shaped cross section. The wafer supports (42) extend substantially horizontally from the column rack supports (40) to define a plurality of slots within the column rack (24) sized to receive the wafer (39). |
