| 摘要 |
<p>A pellicle removing apparatus includes a base plate, a mask accommodating member which accommodates a photomask to which a pellicle having a removal groove for removing adheres and having a movement prevention plate which approaches the photomask to contact a corner portion on an upper surface of the photomask to prevent movement of the photomask and separates from the photomask to allow the movement of the photomask, a mask fixing member coupled to both ends of the base plate to fix the mask accomodating member, a vertical fixing member coupled to a rear portion of the base plae to protrude upward from the base plate, a sixed plate member coupled to the vertical fixing member to be capable of moving up and own with respect to the vertical fixing member and disposed parallel to the base plate, a pair of pull handle members coupled to both ends of the fixed plate member, a central mobile plate member connected to the pull handle member to move upward as the pull handle member is pulled upward, and a removal groove insertion member coupled to the central mobile plate member and having a protrusion inserted into the removal groove of the pellicle. In the pellicle removing apparatus, as the pull handle member is pulled upward, the pellicle receives an upward directionnal force by the removal groove insertion protion so that the pellicle is separated from the photomask. Thus, the pellicle can be conveniently and quickly removed without leaving defects such as scratches on the upper surface of the photomask and the time for removing the pellicle can be saved.</p> |
