WAFER PROCESSING APPARATUS AND TRANSFER DEVICE ADJUSTMENT SYSTEM

摘要

Components of a wafer processing apparatus can be replaced more quickly than conventional. A processing apparatus is composed of constituent components and used for subjecting a wafer to a predetermined processing. An identification symbol is given to each constituent component and related to it. The processing apparatus includes a storage unit where component information concerning each constituent component needed when the constituent component is ordered and the related identification symbols are stored, an entering unit for entering the identification symbol of the constituent component to be ordered, and a display unit for displaying component information related to the entered identification symbol and stored in the storage unit.