| 摘要 |
A apparatus and method for forming windows in semiconductor devices to enable visualization of the circuitry therein while electrically intact. The device is affixed to a table that is oscillated in the X and Y directions while a succession of rotating tools are brought to bear against the surface of the device in the Z direction under a constant force. The force is adjustable so as to allow the tool to float on the surface of the workpiece.
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