| 摘要 |
<p>A ceramic heater for heating the whole of a semiconductor wafer uniformly by supporting it stably without causing it to bend. The ceramic heater having a heating body on the surface of or inside a disk-shaped ceramic base and having through holes for passing lifter pins therethrough in the ceramic base is characterized in that the number of through holes is three or more, and the through holes are formed in an area at a distant from the center of the ceramic base, the distance being over 1/2 of the distance from the center of the ceramic base to the edge.</p> |
