APPARATUS FOR PREVENTING SLIDING OF WAFER

摘要

PURPOSE: An apparatus for preventing sliding of a wafer is provided to prevent a damage or a loss of a wafer by transferring process of the wafer. CONSTITUTION: A chuck(10) has a round groove(20) having the same size as a diameter of a wafer. The round groove(20) is formed at a predetermined position apart from an edge of the chuck(10). The chuck(10) includes a plurality of tips(12) for fixing the wafer. A plurality of fingers are formed between an end portion of the chuck(10) and the tips(12). The fingers are used for lifting the wafer loaded on the round groove(20). The fingers can be shifted to an upper portion or a lower portion.