| 摘要 |
The invention relates to a layered composite comprising a gas-sensitive layer (15) and a catalytically active layer (16), at least sections of the latter having a material connection to the gas-sensitive layer. Said gas-sensitive layer (15) comprises a first material and the catalytically active layer (16) comprises the first material and a catalytically active additive. The specific electric resistance of the catalytically active layer (16) is greater than the gas-sensitive layer (15). The invention also relates to a micromechanical sensor element (5), in particular a gas sensor element comprising a dielectric layer (11), a gas-sensitive layer (15) located thereon and elements (14) for registering an alteration in the electric conductivity of the gas-sensitive layer (15) under the influence of a gas. According to the invention, the surface of the gas-sensitive layer (15) that is not occupied by the dielectric layer (11) is covered by a catalytically active layer (16) and said gas-sensitive layer (15) and the catalytically active layer (16) form the disclosed layered composite. |
