发明名称 Bulk gas built-in purifier with dual valve bulk container
摘要 <p>An apparatus for delivering a gaseous product includes a horizontal container having inlet and outlet ports, an elongated hollow tube inside the container, a purifying medium inside the tube, inlet and outlet control means adapted to control delivery of the fluid to the inlet port and to control delivery of a gaseous product from the outlet port. The tube has a first opening, a second opening spaced apart from the first opening, and an internal axis between the first and second openings. The first opening is in fluid communication with the outlet port and the second opening is in fluid communication with a vapor space in the container. A portion of the internal axis adjacent the second opening is at an angle greater than zero degrees relative to the horizontal longitudinal axis of the container. Each of the inlet and outlet control means preferably are single ported valves. <IMAGE></p>
申请公布号 EP1278005(A1) 申请公布日期 2003.01.22
申请号 EP20020015577 申请日期 2002.07.12
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 PEARLSTEIN, RONALD MARTIN;HERTZLER, BENJAMIN LEE;JARRETT, LAWRENCE PAUL
分类号 H01L21/02;F17C9/00;F17C13/00;(IPC1-7):F17C13/00 主分类号 H01L21/02
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