发明名称 |
Method and circuit for detecting displacements using microelectromechanical sensors with compensation of parasitic capacitances |
摘要 |
<p>A method for detecting displacements of a micro-electromechanical sensor (101) including a fixed body (3) and a mobile mass (4), forming at least a first sensing capacitor (107) and a second sensing capacitor (108), which are connected to a first input terminal (102) and, respectively, to a first output terminal (104) and to a second output terminal (105) of the sensing circuit and have a rest common sensing capacitance (Cs). The method includes the steps of: closing a first negative-feedback loop (136), which comprises the first sensing capacitor (107) and the second sensing capacitor (108) and a differential amplifier (124); supplying to at least one input (124b) of the differential amplifier (124) a staircase sensing voltage (Vs) through driving capacitors (121, 122) so as to produce variations ( DELTA Vc) of an electrical driving quantity (Vc) which are inversely proportional to the common sensing capacitance (Cs); and driving the sensor (101) with the electrical driving quantity (Vc) . <IMAGE></p> |
申请公布号 |
EP1278068(A2) |
申请公布日期 |
2003.01.22 |
申请号 |
EP20020015859 |
申请日期 |
2002.07.16 |
申请人 |
STMICROELECTRONICS S.R.L.;HEWLETT-PACKARD COMPANY |
发明人 |
LASALANDRA, ERNESTO;UNGARETTI, TOMMASO;BASCHIROTTO, ANDREA |
分类号 |
G01P21/00;G01P15/125;G01P15/13;(IPC1-7):G01P15/125 |
主分类号 |
G01P21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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