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发明名称
SYSTEM AND METHOD FOR ILLUMINATING A SEMICONDUCTOR PROCESSING SYSTEM
摘要
申请公布号
EP1277225(A1)
申请公布日期
2003.01.22
申请号
EP20010916697
申请日期
2001.03.15
申请人
ADVANCED MICRO DEVICES INC.
发明人
SINGH, BHANWAR;RANGARAJAN, BHARATH;PHAN, KHOI, A.;CHOO, BRYAN, K.;SUBRAMANIAN, RAMKUMAR
分类号
H01L21/00;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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