发明名称 Thin-film crystal wafer having a pn junction and its manufacturing method
摘要 A thin film crystal wafer with pn-junction comprising a first layer of a first conductivity type which is a 3-5 group compound semiconductor represented by a general formula: Inx Gay AlzP (0&le;x&le;1, 0&le;y&le;1, 0&le;z&le;, x+y+z=1), and the second layer of a first conductivity type which is a 3-5 group compound semiconductor represented by a general formula: InxGayAlz, As (0&le;x&le;1, 0&le;y&le;1, 0&le;z&le;1, x+y+z=1), said second layer being made above said first layer, and at a heterojunction interface formed between said first layer and said second layer, further comprising a charge compensation layer of a first conductivity type with an impurity concentration higher than that of said first and second layers. <IMAGE>
申请公布号 EP1274133(A3) 申请公布日期 2003.01.22
申请号 EP20020014842 申请日期 2002.07.03
申请人 SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 FUKUHARA, NOBORU;YAMADA, HISASHI
分类号 H01L21/04;H01L29/205;H01L29/36;H01L29/737 主分类号 H01L21/04
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