发明名称 |
Method of making tunable thin film acoustic resonators |
摘要 |
An acoustical resonator comprising top and bottom electrodes that sandwich a PZ layer. The resonance frequency of the acoustical resonator may be adjusted after fabrication by utilizing heating elements included in the acoustical resonator and/or by adjusting the thickness of a tuning layer. In the preferred embodiment of the present invention, the electrodes comprise Mo layers. One embodiment of the present invention is constructed on a Si3N4 membrane. A second embodiment of the present invention is constructed such that it is suspended over a substrate on metallic columns. In the preferred embodiment, the electrodes are deposited by a method that minimizes the stress in the electrodes.
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申请公布号 |
US6507983(B1) |
申请公布日期 |
2003.01.21 |
申请号 |
US19980192163 |
申请日期 |
1998.11.13 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
RUBY RICHARD C.;MERCHANT PAUL PHILIP |
分类号 |
H03H3/04;H03H9/02;H03H9/17;H03H9/58;(IPC1-7):H04R17/00 |
主分类号 |
H03H3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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