Surface texture measuring apparatus

摘要

A surface texture measuring apparatus allowing effects of vibration disturbance to be removed and a highly accurate measurement to be achieved. The surface texture measuring apparatus is further provided with a small surface texture measuring apparatus, which detects the amount of vibration of a workpiece while maintaining a detecting device in contact with the surface of the workpiece without moving the device along the workpiece. The main surface texture measuring apparatus conducts measurement with a high accuracy based on the detected unevenness value of the surface of the workpiece and on the amount of vibration detected by the small surface texture measuring apparatus.