发明名称 |
Microelectromechanical structure insensitive to mechanical stresses |
摘要 |
A microelectromechanical structure includes a rotor element having a barycentric axis and suspended regions arranged a distance with respect to the barycentric axis. The rotor element is supported and biased via a suspension structure having a single anchoring portion extending along the barycentric axis. The single anchoring portion is integral with a body of semiconductor material on which electric connections are formed.
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申请公布号 |
US6508124(B1) |
申请公布日期 |
2003.01.21 |
申请号 |
US20000657294 |
申请日期 |
2000.09.07 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
ZERBINI SARAH;SASSOLINI SIMONE;VIGNA BENEDETTO |
分类号 |
G01P9/04;B81B3/00;G01C19/56;G01C19/5684;G01P15/00;G01P15/08;G01P15/125;H01L29/84;(IPC1-7):G01P15/08 |
主分类号 |
G01P9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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