Acceleration sensor element, acceleration sensor, and method of manufacturing the same

摘要

An acceleration sensor element including a weight, a support having a hollow part which is disposed around the weight as a center, and a flexible plate having piezoelectric elements including a piezoelectric body sandwiched by at least one set of electrodes and disposed horizontally across the support to suspend the weight at the hollow part of the support. Acceleration applied from the prior is converted into deflection of the flexible plate based on movement of the weight corresponding to the acceleration, and the direction and rate of the acceleration are three-dimensionally detected by electric charges generated in the piezoelectric body corresponding to deflection of the flexible plate. The piezoelectric elements are disposed only at flexible parts of the flexible plate.