| 摘要 |
PROBLEM TO BE SOLVED: To improve the polishing speed by preventing clogging of a filter and to reduce the occurrence of scar in glass. SOLUTION: In this filtering method for an abrasive slurry 2 obtained by dispersing abrasive material for polishing mainly composed of cerium oxide particles in liquid, with designated voltage applied between a mesh-like electrode and a counter electrode disposed at a designated space in a part of a passage for flowing of the abrasive slurry 2, the abrasive slurry 2 is passed between the mesh-like electrode and the counter electrode to apply an electric current to the abrasive slurry, and immediately after that, the abrasive slurry 2 is supplied to the filter and filtered.
|
