发明名称 |
Method for producing optical quartz glass for excimer lasers and vertical-type heating furnace |
摘要 |
A method for producing an optical quartz glass for use in excimer lasers, comprising a step of forming a porous silica preform by depositing silica in a soot-like form formed by flame hydrolysis of a high-purity volatile silicon compound, followed by a step of vitrifying said porous silica preform into transparent glass in an atmosphere containing water vapor and hydrogen, and a vertical type heating furnace for carrying out the production method therein.
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申请公布号 |
US6508084(B1) |
申请公布日期 |
2003.01.21 |
申请号 |
US20000527655 |
申请日期 |
2000.03.17 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO. KG;SHIN-ETSU QUARTZ PRODUCTS CO., LTD. |
发明人 |
YOKOTA TORU;NISHIMURA HIROYUKI;FUJINOKI AKIRA |
分类号 |
H01L21/027;C03B8/04;C03B19/14;C03B20/00;C03C3/06;(IPC1-7):C03B37/018;G02B6/18 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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地址 |
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