发明名称 Integrated circuit guard ring structures
摘要 An integrated circuit including a die having a circuit area and a plurality of guard rings. The circuit area includes active devices, passive devices, and interconnects connected to form an integrated circuit. The plurality of guard rings includes a plurality of stacked guard rings having substantially equal widths and encircling the circuit area. Alternatively, the plurality of guard rings includes metallization level guard rings interleaved with one or more via level guard rings. Each of the one or more via level guard rings includes one or more guard rings encircling the circuit area. Alternatively, the plurality of guard rings includes a plurality of concentric guard rings encircling the circuit area. Each of the plurality of guard rings is fabricated from a metal, such as aluminum, copper, or silver, or an alloy of aluminum, copper, or silver.
申请公布号 US6509622(B1) 申请公布日期 2003.01.21
申请号 US20000644639 申请日期 2000.08.23
申请人 INTEL CORPORATION 发明人 MA QING;LEE JIN;TRAN QUAN;FUJIMOTO HARRY
分类号 H01L21/768;H01L23/58;(IPC1-7):H01L27/095 主分类号 H01L21/768
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