Method for manufacturing a semiconductor device

摘要

Problematic dishing and erosion in forming embedded metal interconnection by a chemical mechanical polishing (CMP) method are suppressed.Formation of embedded Cu interconnects 46a to 46e by chemical mechanical polishing of a Cu film 46 formed in interconnect trenches 40 to 44 is performed by abrasive-grain-free chemical mechanical polishing using a polishing liquid of an abrasive grain content less than 0.5 wt % (CMP of the first step); with-abrasive-grain chemical mechanical polishing using a polishing liquid of an abrasive grain content of 0.5 or more wt % (CMP of the second step); and selective chemical mechanical polishing using a polishing liquid to which an anticorrosive such as benzotriazole (BTA) is added (CMP of the third step).