| 摘要 |
PROBLEM TO BE SOLVED: To efficiently decompose and treat a fluorine compound selected from CF4 , CHF3 , C3 F8 and C4 F8 . SOLUTION: A gas stream containing the fluorine compound selected from CF4 , CHF3 , C3 F8 , and C4 F8 is brought into contact with either one of catalysts consisting of Al and Zn, Al and Ni, or Al, Ni and Zn at about 200-800 deg.C under the presence of water vapor. Thus, the fluorine in the gas stream is efficiently converted into hydrogen fluoride at relatively lower temperatures. |
