| 摘要 |
PROBLEM TO BE SOLVED: To stably form a zinc oxide thin film excellent in substrate adhesion on a substrate in good yield by dipping a conductive substrate and a counter electrode in an aq. soln. contg. nitrate ion, zinc ion and carbohydrate and applying a current between the substrate and the electrode. SOLUTION: An aq. electrodeposition soln. 202 contg. nitrate ion, zinc ion and carbohydrate is held in a corrosion-resistant vessel 201. The conductive substrate 203 as a cathode and the mesh or rod counter electrode 204 as an anode are dipped in the soln. 202, and the substrate 203 and the counter electrode 204 are connected to a power source 206 through a load resistance 205. A current is applied between the substrate 203 and the counter electrode 204 to form zinc oxide thin film on the substrate 203. The soln. is agitated by a circulating pump 209 to uniformly form the layer and to increase the layer forming rate. The aq. soln. is preferably controlled to >=50 deg.C by using a heater 207 and a thermocouple while monitoring the temp. |
