| 摘要 |
FIELD: piezoelectric engineering; high- frequency crystal resonators. SUBSTANCE: method includes covering crystal element with thin-film electrodes using metal evaporation process, its mounting in holder, heat aging at (100±10)°C, frequency tuning by ion-plasma etching of electrodes while checking up parameters, and encapsulating in package; novelty is that crystal electrodes are manufactured from two aluminum and silver layers formed in single process cycle one after another, with crystal frequency adjusted to rated value by etching upper layer of electrode formed by silver diffusion in aluminum as result of heat aging. EFFECT: improved spectral characteristics.
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