发明名称 |
PROCESS OF MANUFACTURE OF DIFFRACTION OPTICAL ELEMENTS ON DIAMOND AND DIAMOND-LIKE SUBSTRATES |
摘要 |
FIELD: optical instrumentation engineering. SUBSTANCE: process is intended for formation of complex diffraction optical elements-phase-only synthetic holograms, focusing devices, correctors, etc. Process of manufacture of diffraction optical elements on diamond and diamond- like substrates consists in deposition of catalytic mask on substrate and in subsequent heating of structure in atmosphere of carrier gas with the aid of wide-aperture radiation flux with wave length lying in spectral window of processed material. EFFECT: high degree of precision of reconstruction of microrelief with zero degradation of substrate material. 4 dwg
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申请公布号 |
RU2197006(C2) |
申请公布日期 |
2003.01.20 |
申请号 |
RU20010108328 |
申请日期 |
2001.03.27 |
申请人 |
INSTITUT SISTEM OBRABOTKI IZOBRAZHENIJ RAN |
发明人 |
VOLKOV A.V.;KAZANSKIJ N.L.;MOISEEV O.JU.;SOJFER V.A. |
分类号 |
G02B5/18;B28D5/00;C30B33/12;G03F7/36;(IPC1-7):G02B5/18 |
主分类号 |
G02B5/18 |
代理机构 |
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