发明名称 PROCESS OF MANUFACTURE OF DIFFRACTION OPTICAL ELEMENTS ON DIAMOND AND DIAMOND-LIKE SUBSTRATES
摘要 FIELD: optical instrumentation engineering. SUBSTANCE: process is intended for formation of complex diffraction optical elements-phase-only synthetic holograms, focusing devices, correctors, etc. Process of manufacture of diffraction optical elements on diamond and diamond- like substrates consists in deposition of catalytic mask on substrate and in subsequent heating of structure in atmosphere of carrier gas with the aid of wide-aperture radiation flux with wave length lying in spectral window of processed material. EFFECT: high degree of precision of reconstruction of microrelief with zero degradation of substrate material. 4 dwg
申请公布号 RU2197006(C2) 申请公布日期 2003.01.20
申请号 RU20010108328 申请日期 2001.03.27
申请人 INSTITUT SISTEM OBRABOTKI IZOBRAZHENIJ RAN 发明人 VOLKOV A.V.;KAZANSKIJ N.L.;MOISEEV O.JU.;SOJFER V.A.
分类号 G02B5/18;B28D5/00;C30B33/12;G03F7/36;(IPC1-7):G02B5/18 主分类号 G02B5/18
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