发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a method of manufacturing the same for reducing parasitic resistance, and thereby monitoring transistor properties easily and at an early stage of wafer process. SOLUTION: Lead wiring layers 11a and 11c are electrically connected to each pair of source/drain region 3 of a monitor transistor MT. These lead wiring layers 11a and 11c are formed on an insulation layer 10, which is same with the insulation layer where a conducting layer for a bit line of memory cell region is formed. Each of the lead wiring layers 11a and 11c has contact units 11b and 11d which are wide enough to connect a probe needle thereto from outside.
申请公布号 JP2003017540(A) 申请公布日期 2003.01.17
申请号 JP20010198555 申请日期 2001.06.29
申请人 MITSUBISHI ELECTRIC CORP 发明人 TAKEUCHI MASAHIKO
分类号 H01L21/66;H01L21/8242;H01L23/544;H01L27/108 主分类号 H01L21/66
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