| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater with which the damage to its substrate is avoided and a specified temperature can be reached in a short period of time. SOLUTION: The heater X1 equipped with a substrate 1 composed of a first face 10 and a second face 11 and with heating elements 2, 3 arranged at the side of the first face 10 of the substrate 1 is provided further with a high thermal conductive layer 6A with higher thermal conductivity than the substrate 1. The high thermal conductive layer 6A is formed on the side of the first face 10 of the substrate 1, as an example, in a state glass layers 4, 5 are arranged interposed between the first face of the substrate 1 and the high thermal conductive layer 6A.
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