| 摘要 |
PROBLEM TO BE SOLVED: To provide a electrode structure for quartz vibrators that can ensure etching. SOLUTION: In the electrode structure for a quartz vibrator formed by providing an electrode on a major side of a quartz chip by means of etching, a Cr layer is employed for the 1st layer from the major side of the quartz chip, a Cr diffusion preventing metallic layer e.g. an Ag layer is employed for the 2nd layer, and an Au layer is employed for the 3rd layer.
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