发明名称 RESIST REMOVER COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a photoresist remover composition capable of easily removing photoresist residue at a low temperature in a short time. SOLUTION: The resist remover composition comprises an amine compound and an aldehyde compound having >=40 deg.C boiling point under ordinary pressure or at least one compound selected from equivalents of the aldehyde compound.
申请公布号 JP2003015321(A) 申请公布日期 2003.01.17
申请号 JP20010199619 申请日期 2001.06.29
申请人 MITSUBISHI GAS CHEM CO INC 发明人 IKEMOTO KAZUTO;ABE HISAOKI;MARUYAMA TAKEHITO;AOYAMA TETSUO
分类号 G03F7/42;H01L21/027;(IPC1-7):G03F7/42 主分类号 G03F7/42
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