发明名称 Verfahren zur Herstellung einer elektrisch isolierenden Schicht zwischen zwei duennen, elektrisch leitenden Schichten
摘要 974,667. Coating by vapour deposition. INTERNATIONAL BUSINESS MACHINES CORPORATION. Aug. 24, 1961 [Aug. 29, 1960], No. 30514/61. Heading C7F. [Also in Division H1] A substrate 17 is supported in an evacuated bell-jar 11 above a mask 19 and shutter 25, the shutter being rotatable by a knob 29 to control with the mask 19 the area of the substrate over which electrically conducting and insulating coatings are successively deposited. The conducting material, e.g. lead or tin, is contained in a crucible 31 and the insulating material, e.g. silicon monoxide, in a crucible 35, the crucibles being selectively heated electrically by coils 33, 37 while the substrate is heated electrically at 21. A voltage is applied over lines 45 between successive conductive coatings as the second of each pair of such coatings is deposited.
申请公布号 DE1200403(B) 申请公布日期 1965.09.09
申请号 DE1961J020420 申请日期 1961.08.18
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 WEED DONALD STRIPPLE
分类号 C23C14/22;G11C11/44;H01B1/00;H01B3/00;H01B3/02;H01B3/10;H01G2/00;H01G13/00;H01L39/18;H01L39/24 主分类号 C23C14/22
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