SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device enlarging the shape of individual capacitors by eliminating a dead space in arrangement of the capacitors. SOLUTION: The semiconductor device is provided with the capacitors 14 extending upward from the upper face of each storage node contact 9 and formed so as to have a substantially elliptical cross sectional shape. The arrangement of the capacitors 14 seen from upward forms a capacitor row arranging a plurality of the capacitors 14 at regular intervals along the direction of a substantially elliptical long axis. When one arbitrary capacitor row is noticed as a first capacitor row, an adjacent second capacitor row is arranged in parallel and the first capacitor row and the second capacitor row have a difference deviating only a distance corresponding to a sum of one width of a transfer gate 2 in a phase arranging the capacitors and one width of a gap making the transfer gate.