ALIGNMENT METHOD, METHOD AND APPARATUS FOR EXPOSURE, AND METHOD FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To improve alignment precision by obtaining an automatic selecting method for an alignment measurement sample shot which is not affected by the size for a alignment method for a plurality of reference layers. SOLUTION: By the alignment method for positioning an original plate and a substrate by measuring the position of a measurement mark at a plurality of shot positions on the substrate and statistically processing measured values, measurement marks which used for the alignment is selected individually when a plurality of measurement marks are present in the shot.