| 发明名称 |
METHOD AND DEVICE FOR SEPARATING MEMBER |
| 摘要 |
PROBLEM TO BE SOLVED: To properly separate a composite substrate independent of distortion of the composite substrate, etc. SOLUTION: The separating device is provided with a position adjusting mechanism 140 for adjusting the position of a nozzle 120 to jet a fluid. According to the program which is preset considering that the composite substrate has a distortion within a prescribed limit, the position adjusting mechanism 140 changes the height of the nozzle 120 stepwise to separate a composite substrate 50.
|
| 申请公布号 |
JP2003017667(A) |
申请公布日期 |
2003.01.17 |
| 申请号 |
JP20010199344 |
申请日期 |
2001.06.29 |
| 申请人 |
CANON INC |
发明人 |
YANAGIDA KAZUTAKA;SAKAGUCHI KIYOBUMI;EDA MITSUHARU;FUJIMOTO AKIRA |
| 分类号 |
H01L21/00;H01L21/02;H01L21/306;H01L21/336;H01L21/68;H01L21/762;H01L27/12;H01L29/786;(IPC1-7):H01L27/12 |
主分类号 |
H01L21/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
