摘要 |
PURPOSE: A drying device is provided to minimize the introduction of impurities and water particles with respect to a second space of a process chamber by controlling an opening degree of a door provided to an inner wall. CONSTITUTION: A drying device includes a process chamber(102) for carrying out the drying process for a plate-shaped object(100) and having an inlet(104) and an outlet for introducing or discharging the object, an air spraying unit(120) mounted in the process chamber for spraying air to upper and lower surfaces of the object in the opposite direction of an advancing direction of the object from the inlet to the outlet, thereby removing the water from the upper and lower surfaces of the object, and an inner wall(112) mounted in the process chamber to be defined into a first space(108) adjacent to the inlet and a second space(110) mounted with the air spraying unit and having a door(114) for introducing the object from the first space to the second space, wherein the first space is to prevent the impurities introduced via the inlet from being introduced into the second space.
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