发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide an insulation film of a low dielectric constant and high mechanical strength, and to provide a semiconductor device capable of reducing both of a capacity between wiring layers and a capacity between wires, even if in refining and high integration of the semiconductor device. SOLUTION: The semiconductor comprises the inorganic insulation film of porus structure formed on the surface of a substrate and comprising at least on supporting a single support body in an air hole inside.</p> |
申请公布号 |
JP2003017487(A) |
申请公布日期 |
2003.01.17 |
申请号 |
JP20010198990 |
申请日期 |
2001.06.29 |
申请人 |
ROHM CO LTD |
发明人 |
NISHIYAMA NORIKAZU;KAMIYAMA KOREICHI;OKU YOSHIAKI |
分类号 |
H01L23/522;H01L21/316;H01L21/768;H01L21/8246;H01L27/105;(IPC1-7):H01L21/316 |
主分类号 |
H01L23/522 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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