发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide an insulation film of a low dielectric constant and high mechanical strength, and to provide a semiconductor device capable of reducing both of a capacity between wiring layers and a capacity between wires, even if in refining and high integration of the semiconductor device. SOLUTION: The semiconductor comprises the inorganic insulation film of porus structure formed on the surface of a substrate and comprising at least on supporting a single support body in an air hole inside.</p>
申请公布号 JP2003017487(A) 申请公布日期 2003.01.17
申请号 JP20010198990 申请日期 2001.06.29
申请人 ROHM CO LTD 发明人 NISHIYAMA NORIKAZU;KAMIYAMA KOREICHI;OKU YOSHIAKI
分类号 H01L23/522;H01L21/316;H01L21/768;H01L21/8246;H01L27/105;(IPC1-7):H01L21/316 主分类号 H01L23/522
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