| 摘要 |
PROBLEM TO BE SOLVED: To continue the connection of a component by regenerating an chucking surface in short time while holding the component by means of this chucking surface, whose abrasion resistance is improved without lowering vibration characteristics of a component mounting tool, and performing mounting with the ultrasonic connection between metal joints. SOLUTION: While pressurizing the component 3 that is chucked to the chucking surface 14a, which is made to have a prescribed surface roughness for friction bonding using ultrasonic vibration, of a chucking nozzle 14 to an object to be mounted 4 with mutual metal joints opposite to each other, by applying ultrasonic vibration to the chucking nozzle 14, the metal joints are rubbed and bonded using ultrasonic wave, and the component is mounted. While repeating this mounting, the chucking surface 14a is cleaned by applying ultrasonic vibration to the chucking nozzle 14 in the state to be immersed in a cleaning liquid 112, and thus a regenerating process to regenerate the chucking surface 14a in the prescribed surface roughness is performed and the recycling process is performed after having polished the chucking surface 14a. Thus, the purpose of the invention is achieved. |
