PIEZOELECTRIC RESONATOR, FILTER, ELECTRONIC COMMUNICATION UNIT, AND MANUFACTURING METHOD FOR THE PIEZOELECTRIC RESONATOR

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric resonator where a shape such as the thickness of a beam can freely be set in matching with the purpose of reinforcing the diaphragm strength. SOLUTION: The manufacturing method for the piezoelectric resonator includes a 1st process of etching a rear side of a substrate 2 on the front side of which a diaphragm 3 is formed to have a shape corresponding to a required through-opening 6 so as to form a bottomed opening 8 with a bottom 7 having a thickness of at least the beam 4 on the rear side of the substrate and a 2nd process of emitting a laser selectively to the bottom from the rear side of substrate to eliminate the bottom while leaving a region of forming the beam thereby exposing the diaphragm rear side. Thus, the manufacturing method enables free settling of the shape such as the thickness of the beam in matching with the reinforcement purpose of the diaphragm strength.