| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator which can produce a driving force as large as possible in a limited space. SOLUTION: A movable electrode 13 reciprocates in the prescribed direction DR on the basis of currents supplied to first and second fixed electrodes 19a, 19b, between which insulating solid segments 21 are sandwiched. The solid segments 21 increase rigidity of the fixed electrodes 19a, 19b. When wall thicnesses of the electrodes 19a, 19b are reduced, sufficient rigidity is ensured in the electrodes 19a, 19b. Since the wall thicknesses are reduced, the fixed electrodes 19a, 19b can be formed as many as possible in the limited space. When the number of fixed electrodes 19a, 19b, facing the movable electrode 13 is increased, a large driving force can be applied to the movable electrode 13.
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